Western Nanofabrication Facility

Western University (The University of Western Ontario), London, Ontario
What the facility does

Nanofabrication, material characterization, material  deposition surface characterization, device fabrication

Areas of expertise

Western’s Nanofabrication Facility provides the techniques and expertise to conceive and fabricate micro- and nanoscale devices, characterize them using  a coherent suite of instrumentation.

Research services

Device fabrication, characterization, focused ion beam, TEM sample preparation, material deposition, deep reactive ion etching, clean room facility, SEM facility, spin coater, profilometry

Sectors of application
  • Aerospace and satellites
  • Automotive
  • Defence and security industries
  • Energy
  • Manufacturing and processing
  • Mining, minerals and metals
Specialized labEquipmentFunction
Scanning electron microscopeLEO 1530Scanning electron microscope
Scanninf electron microscope with FIB capabilities and elemental analysisLEO 1540Xray dispersion, focused ion beam carving for sample characaterization
Spin coaterCEEOrganic Thin film material deposition
PVD material deposition Oxide and metal deposition
Electron beam deposition Gold, Titanum , silver deposition
ProfilometerTencorSurface characterization
EllipsometerWoolam VaseMultiangle multi wavelength ellipsometer
HDMS oven Changing hydrophobicity of surface
Mask alignerKarl suss, MJB3, 
Electroplating bath  
Langmuir Blodgett troughKSVMonolayer film deposition
STS PECVD Deposition of silicondioxyde, silicon nitride, silicon oxynitride
STS Reactive ion etching  
Gasonics Aura Oxygen Plasma AsherGasonicsmicroprocessor controlled downstream photoresist stripper
Alcatel 601 deep reactive ion etchingAlcatelThis system etches micron-scale patterns into silicon. 

Optical microscope microscope


ZeissOptical microscope for visual inspection of samples and surfaces
Stereozoom microscopeLeica MZ12.5Stereozoom microscope
UV-Ozone cleaner Ultra cleaning of surface vis UV-Ozone irradiation
Class 100 and 1000 clean room facility Sample preparation in dractic clean space
Grey space for standard sample preparation Sample preparation in less demanding clean space.


  • Scisense Inc.
  • Sciencetech Inc.
  • University of Western Ontario
  • University of Waterloo
  • Université de Montréal
  • Université Laval
  • University of Toronto
  • University of Windsor
  • McMaster University
Western Nanofabrication Newslettershttp://nanofab.uwo.ca/research/Newsletter.html
Western Nanofabrication Postershttp://nanofab.uwo.ca/research/posters.html
Western Nanofabrication Publicationshttp://nanofab.uwo.ca/research/publications.html