York University Microfabrication Facility (YMF)

York University, Toronto, Ontario
What the facility does

Microfabrication cleanroom user facility providing tool access and services for applications such as biomedical science, space technologies, micro-electromechanical systems (MEMS) and electronics. 

Areas of expertise

The York University Microfabrication Facility (YMF) is a gateway to cutting-edge micro- and nanotechnology solutions in the northern GTA and vicinity. YMF specializes in providing expertise in microfabrication processes, including lithography, thin-film deposition, etching, and characterization. What sets us apart is our state-of-the-art equipment and experienced staff. The semi-automatic UV LED mask aligner is one of its kind that can accommodate both research prototyping and short-run manufacturing. The photolithography film (transparency) mask printer is unique in academia to provide a solution for low-cost and high-quality photomasks. The physical vapor deposition (PVD) (eBeam evaporator and sputter system) and plasma-enhanced chemical vapor deposition (PECVD) systems are the most up-to-date instruments with the advanced and newest technologies. The team, consisting of PhDs with industrial backgrounds, can support every step of the microfabrication process.

Research services
  • Photolithography film (transparency) mask printing
  • Thin film deposition including a wide selection of metals (Au, Ag, Al, Cr, Ni, Cu, Ti, etc.) and other materials including conductors, semiconductors, and dielectrics (SiOx, SixNy, TiO2, ITO, etc.)
  • Polydimethylsiloxane (PDMS) prototyping and SU8 master mould fabrication services, for example, for microfluidics
  • Surface characterization service with a contact profilometer
  • Lab and equipment access on a user fee basis for custom fabrication
Sectors of application
  • Aerospace and satellites
  • Clean technology
  • Information and communication technologies and media
  • Life sciences, pharmaceuticals and medical equipment
  • Manufacturing and processing
Specialized lab Equipment Function
Thin-film Processing Lab (TPL)Trion Technology Minilock Duo III Inductively Coupled Plasma - Reactive Ion Etching (RIE-ICP) and plasma-enhanced chemical vapor deposition (PECVD) systemDeposition and dry etching of Si, SiOx and SixNy. Includes a loadlock with a robotic arm enabling seamless transfer between the deposition and the etching chamber.
 Angstrom Engineering Nexdep eBeam EvaporatorAccommodates up 6 sources for a seamless multi-material deposition. Allows simultaneous deposition on up to three 4’’ silicon wafers with a dome. Features a variable angle stage for shadow deposition.
 Angstrom Engineering EvoVac Sputter Deposition System500mm x 500mm baseplate, with 3 direct current (DC) sputter sources and 3 radio frequency (RF) sputter sources for multi-material deposition, and a backplate RF sputter source for substrate cleaning. The system also features reactive sputtering for a more efficient deposition process of oxide materials.
 Keyence Digital Microscope, Model VHX-970FAutomatic microscopic tool featuring 20x – 2000x magnification, bright field/dark field/polarised/mixed lighting with a motorized z-stage for auto-focus and 3D profiling.
Photolithography Lab (PLL)OAI Enhanced Mask Aligner, Model 800EWorks with a substrate size of up to 8’’ diameter. Features a UV LED light source with both i-line and g-line wavelength, backside alignment capability, auto wedge effect compensation and auto-alignment utilising the latest pattern recognition technology from Cognex.
 Laurell Spin Coater, Model 650-8NHosts a wafer size of up to 8" and has an alignment tool to assist mounting a wafer.
 Plasma Etch PE-50 XL Benchtop Low Pressure Plasma SystemPlasma asher with oxygen plasma capability, a fully automated system for surface modification and light plasma cleaning.
 KLA Alpha-Step D-600 Stylus ProfilerContact profilometer equipped with an 8" motorized stage, enabling auto-rasterization for surface topography with a height from 10nm to 1.2mm.
 DFMZ Wet Processing Bench, Model TXH-6Equipped with deionized (DI) water and compressed nitrogen. Internal environment is up to Class 100 condition. 
  • ventureLAB
  • CMC Microsystems
The York University Microfabrication Facility (YMF) in 30 Seconds.https://www.youtube.com/watch?v=x_6-WsHgspA&list=TLGGftDJykqYNoUxODA0MjAyNA
Explore the York University Microfabrication Facility (YMF) at Lassonde School of Engineering.https://www.youtube.com/watch?v=YS7r6gB7h5Y